EJUZNOA402A4 Zinc Oxide with Alumina by Kurt J. Lesker

EJUZNOA402A4

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The Kurt J. Lesker part number EJUZNOA402A4 is a specialized Zinc Oxide/Alumina target composed of ZnO/Al2O3 at a 98/2 wt% ratio with a 99.99% purity level. This component features a diameter of 2.00 inches and a thickness of 0.125 inches, with a tolerance of plus or minus 0.010 inches across all dimensions, and achieves approximately 90 to 95% density. Built for specialized thin-film deposition systems, the target material is indium bonded to an OFHC 101 copper backing plate. The backing plate matches the 2.00-inch diameter and 0.125-inch thickness dimensions with the same plus or minus 0.010-inch tolerance. This assembly is subject to Supplement No. 1 (LEF-215) guidelines and corresponds to item commodity code 28170000.

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Characteristics

Manufacturer Kurt J. Lesker
Part number EJUZNOA402A4
Inner Code 3296999

Technical specification

Product type Zinc Oxide with Alumina Sputtering Target
Composition ZnO/Al2O3 98/2 WT%
Purity 99.99%
Target Diameter 2.00"
Target Thickness 0.125"
Dimensional Tolerance +/-0.010" all
Density ~90-95%
Bonding Indium bonded
Backing Plate Material Copper, OFHC 101, Cu
Backing Plate Diameter 2.00"
Backing Plate Thickness 0.125"
Item Commodity Code 28170000
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