EJUZNOX502A4 ZINC OXIDE TARGET by Kurt J. Lesker
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The EJUZNOX502A4 is a high-purity zinc oxide (ZnO) target utilized in thin-film deposition processes. This sintered target maintains a 99.999% purity level and measures 2.00 inches in diameter with a thickness of 0.125 inches, featuring a tolerance of +/- 0.010 inches overall. To ensure stable thermal and electrical contact during operation, the zinc oxide material is indium bonded to a copper backing plate. The backing plate is manufactured from OFHC 101 copper (Cu), matching the target's 2.00-inch diameter and 0.125-inch thickness with a +/- 0.010-inch overall tolerance. Supplement No. 1 (LEF-215) applies to this specific item.
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Characteristics
| Manufacturer | Kurt J. Lesker |
|---|---|
| Part number | EJUZNOX502A4 |
| Inner Code | 3297001 |
Technical specification
| Product type | Zinc Oxide Sintered Sputtering Target |
|---|---|
| Material | Zinc Oxide (ZnO) / OFHC 101 Copper (Cu) |
| Purity | 99.999% |
| Target Diameter | 2.00" |
| Target Thickness | 0.125" |
| Tolerance | +/- 0.010" all |
| Bonding | Indium bonded to copper backing plate |
| Backing Plate Material | OFHC 101 Cu |
| Backing Plate Diameter | 2.00" |
| Backing Plate Thickness | 0.125" |
| Commodity Code | 28170000 |